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Design of the entrance ion optics for SIMS and LEIS in situ monitoring of deposition processes

✍ Scribed by S. Průša; J. Zlámal; T. Šikola

Book ID: 114169826
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 260 KB
Volume: 136-138
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00900-2

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