✦ LIBER ✦

Design of experimental optimization for ULSI CMP process applications

✍ Scribed by Sung-Woo Park; Chul-Bok Kim; Sang-Yong Kim; Yong-Jin Seo

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 488 KB
Volume: 66
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00932-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A study on the reproducibility of HSS ST

A study on the reproducibility of HSS STI-CMP process for ULSI applications

✍ So-Young Jeong; Sang-Yong Kim; Yong-Jin Seo 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 604 KB

The use of chemical-mechanical polishing (CMP) as a global planarization in ULSI process technology is increasing rapidly. In particular, to achieve the higher density and greater performance, the shallow trench isolation (STI)-CMP process has been attracting attention for multilevel interconnection

Design of experiment (DOE) method consid

Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process

✍ Nam-Hoon Kim; Min-Ho Choi; Sang-Yong Kim; Eui-Goo Chang 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 243 KB

Process optimization of copper MOCVD usi

Process optimization of copper MOCVD using modeling experimental design

✍ Marie-José Mouche; Jean-Luc Mermet; Fabrice Pires; Emmanuel Richard; Joaquin Tor 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 465 KB

Application of FE analysis for optimal d

Application of FE analysis for optimal design of caulking process

✍ Jingee Park; Junyoung Park; Seogou Choi; Kyounghoan Na; Youngsuk Kim 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 963 KB

An inner tie-rod (ITR) end-assembly module is widely used in the steering systems of automobiles. The ITR module is composed of a ball-stud, ball-seat, and socket and manufactured by a caulking process. To ensure that the final ITR module is qualified for application, the caulking process of the ITR

A new approach to batch process optimiza

A new approach to batch process optimization using experimental design

✍ Paul J. Wissmann; Martha A. Grover 📂 Article 📅 2009 🏛 American Institute of Chemical Engineers 🌐 English ⚖ 573 KB

## Abstract Empirical and mechanistic experimental design methods are combined to construct partial models, which are, thus, used to design a process. The grid algorithm restricts the next experimental point to potential process optima, according to the confidence intervals around the optimal point

Experimental design for the optimization

Experimental design for the optimization of lipid nanoparticles

✍ J. Zhang; Y. Fan; E. Smith 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 192 KB

Solid lipid nanoparticles (SLN) have been extensively investigated as a promising drug delivery system for controlling the release of therapeutic agents. Currently, there are many manufacturing methods available for SLN, including the high pressure homogenization method and the microemulsion techniq