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Process optimization of copper MOCVD using modeling experimental design

✍ Scribed by Marie-José Mouche; Jean-Luc Mermet; Fabrice Pires; Emmanuel Richard; Joaquin Torres; Jean Palleau; François Braud

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
465 KB
Volume
91
Category
Article
ISSN
0169-4332

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## Abstract Empirical and mechanistic experimental design methods are combined to construct partial models, which are, thus, used to design a process. The grid algorithm restricts the next experimental point to potential process optima, according to the confidence intervals around the optimal point