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Design of a UHV reactor for microwave plasma deposition of diamond films

✍ Scribed by MG Jubber; JIB Wilson; IC Drummond; P John; DK Milne


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
1024 KB
Volume
45
Category
Article
ISSN
0042-207X

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On the plasma deposition of diamond film
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