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Design of a film surface roughness-minimizing molecular beam epitaxy process by reduced-order modeling of epitaxial growth

✍ Scribed by Gallivan, Martha A.

Book ID: 120824630
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 361 KB
Volume: 95
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1632554

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