A square indicator using multilayer coplanar waveguide transmission lines on ( ) a GaAs fabricated by using monolithic microwave integrated circuits MMIC technology is presented. The polyimide layer formation, curing and dry etching processes are used in an attempt to obtain high quality dielectric
Design and simulation of a novel bridge-like coplanar waveguide for microelectromechanical systems
β Scribed by Xiaofeng Sun; Guifu Ding; Hong Wang; Zhenxin Jiang; Binhong Li; Minyi Shen
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 277 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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