Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

✍ Scribed by Bajt, Saša ;Chapman, Henry N. ;Nguyen, Nhan ;Alameda, Jennifer ;Robinson, Jeffrey C. ;Malinowski, Michael ;Gullikson, Eric ;Aquila, Andrew ;Tarrio, Charles ;Grantham, Steven

• Book ID: 115350999
• Publisher: The Optical Society
• Year: 2003
• Tongue: English
• Weight: 428 KB
• Volume: 42
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.42.005750