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Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

โœ Scribed by Bayraktar, Muharrem; Wessels, Werner A; Lee, Chris J; van Goor, Fred A; Koster, Gertjan; Rijnders, Guus; Bijkerk, Fred


Book ID
118233386
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
228 KB
Volume
45
Category
Article
ISSN
0022-3727

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