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Design and performance of a microcantilever-based hydrogen sensor

✍ Scribed by D.R. Baselt; B. Fruhberger; E. Klaassen; S. Cemalovic; C.L. Britton Jr.; S.V. Patel; T.E. Mlsna; D. McCorkle; B. Warmack

Book ID
108469529
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
372 KB
Volume
88
Category
Article
ISSN
0925-4005

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Sensitivity improvement of a microcantil
Sensitivity improvement of a microcantilever based mass sensor
✍ Margarita Narducci; Eduard Figueras; MarΓ­a JosΓ© Lopez; Isabel GrΓ cia; Joaquin Sa πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 347 KB

This article describes two approaches for sensitivity improvement of a micromachined silicon T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity values, higher order resonance mode was used and device dimensions were reduced. The cantilevers proposed are pie