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A microcantilever-based gas flow sensor for flow rate and direction detection

โœ Scribed by Rong-Hua Ma; Po-Cheng Chou; Yu-Hsiang Wang; Tzu-Han Hsueh; Lung-Ming Fu; Chia-Yen Lee

Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
298 KB
Volume
15
Category
Article
ISSN
0946-7076

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This paper presents the fabrication and characterization of a curved-up piezoresistive microcantilever flow sensor. The microcantilever sensor, fabricated with silicon-on-insulator (SOI) wafers, consists of two layers of silicon dioxide and a silicon piezoresistor in-between. The difference in the r