For MEMS devices with power consumption in the range of micro-watts, thermal energy harvesting becomes a viable candidate for power supply. This paper describes a multipurpose platform to fabricate thermoelectric generators in a combined surface and bulk micromachining process. The thermocouples are
โฆ LIBER โฆ
Design and fabrication of a novel MEMS thermoelectric generator
โ Scribed by Simone Dalol; Vittorio Ferrari
- Book ID
- 119355537
- Publisher
- Elsevier
- Year
- 2011
- Tongue
- English
- Weight
- 947 KB
- Volume
- 25
- Category
- Article
- ISSN
- 1877-7058
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