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Microelectromechanical systems (MEMS): fabrication, design and applications

โœ Scribed by Judy, Jack W

Book ID
118171995
Publisher
Institute of Physics
Year
2001
Tongue
English
Weight
923 KB
Volume
10
Category
Article
ISSN
0964-1726

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โœ Zachary J. Davis; Winnie Svendsen; Anja Boisen ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 624 KB

Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato