๐”– Bobbio Scriptorium
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The Future of Microelectromechanical systems (MEMS)

โœ Scribed by T. F. Marinis


Book ID
111200869
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
841 KB
Volume
45
Category
Article
ISSN
0039-2103

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Future of microelectromechanical systems
โœ Minhang Bao; Weiyuan Wang ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 792 KB

The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact,