Future of microelectromechanical systems
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Minhang Bao; Weiyuan Wang
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Article
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1996
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Elsevier Science
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English
โ 792 KB
The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact,