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Design and fabrication of a micro-optic switch

✍ Scribed by Li, Wei; Liang, Jingqiu; Liang, Zhongzhu; Li, Xiaoqi; Wang, Weibiao; Zhong, Yanchao; Sun, Degui

Book ID
115409122
Publisher
Optical Society of America
Year
2008
Tongue
English
Weight
256 KB
Volume
16
Category
Article
ISSN
1094-4087

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## Abstract This paper describes electrostatically actuated micromechanical optical switches based on the slant‐counter electrode, and proposes an advanced method of fabricating the slant‐counter electrode. The pull‐in voltage and switching time are investigated. The slant‐counter electrode is fabr