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Design and fabrication of a broadband polymer vertically coupled optical switch

✍ Scribed by Kaixin Chen; Chu, P.L.; Kin Seng Chiang; Hau Ping Chan

Book ID
115371697
Publisher
Optical Society of America
Year
2006
Tongue
English
Weight
300 KB
Volume
24
Category
Article
ISSN
0733-8724

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## Abstract This paper describes electrostatically actuated micromechanical optical switches based on the slant‐counter electrode, and proposes an advanced method of fabricating the slant‐counter electrode. The pull‐in voltage and switching time are investigated. The slant‐counter electrode is fabr