Design and fabrication of slant-counter electrodes for optical switches

✍ Scribed by Wei Dong; Shengping Ruan; Xindong Zhang; Caixia Liu; Dongming Sun; Cuiping Jia; Jianxuan Pan; Ping Ji; Weiyou Chen

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 97 KB
• Volume: 41
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.20115

✦ Synopsis

Abstract

This paper describes electrostatically actuated micromechanical optical switches based on the slant‐counter electrode, and proposes an advanced method of fabricating the slant‐counter electrode. The pull‐in voltage and switching time are investigated. The slant‐counter electrode is fabricated by anisotropic wet etching of a (111) silicon wafer tilted at a 2.5° angle, which is normally tilted 2.5° off the 〈111〉 direction toward the nearest 〈110〉 direction. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 41: 273–275, 2004; Published online in Wiley Interscience (www.interscience.wiley.com). DOI 10.1002sol;mop.20115