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Design and analysis of diffraction mirror optics for EUV projection lithography

โœ Scribed by Hiroshi Fukuda; Tsuneo Terasawa


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
309 KB
Volume
27
Category
Article
ISSN
0167-9317

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We present a logical design of an all-optical processor that performs modular arithmetic. The overall design is based a set of interconnected modules that use all-optical gates to perform simple logical functions. The all-optical logic gates are based on the semiconductor optical amplifier nonlinear