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Depth resolution optimization for low-energy ERDA

✍ Scribed by S. Giangrandi; K. Arstila; B. Brijs; T. Sajavaara; A. Vantomme; W. Vandervorst


Book ID
108223962
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
146 KB
Volume
261
Category
Article
ISSN
0168-583X

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By the use of a deceleration electrode in the primary beam line of a magnetic sector SIMS instrument, an O 2 primary beam of variable energy and angle has been produced. The SIMS measurements of ultrathin Ge and B layers in Si were performed with low-energy (0.7-2 keV) and grazingly incident (50-75Γ„