Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

✍ Scribed by S. Giangrandi; T. Sajavaara; B. Brijs; K. Arstila; A. Vantomme; W. Vandervorst

• Book ID: 108224367
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 709 KB
• Volume: 266
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2008.08.018