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Depth resolution for AES sputter profiles of GaAs/GaInAs strained superlattices

✍ Scribed by J. Morais; T.A. Fazan; R. Landers

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
291 KB
Volume
72
Category
Article
ISSN
0169-4332

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Depth resolution in sputter depth profil
Depth resolution in sputter depth profiling-characterization of a third batch of tantalum pentoxide on tantalum certified reference material by AES and SIMS
✍ Seah, M. P.; Spencer, S. J.; Gilmore, I. S.; Johnstone, J. E. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 318 KB πŸ‘ 2 views

Depth profiles have been made for a new batch of the certified reference material, BCR 261, of ~30 nm and 100 nm of anodic tantalum pentoxide layers on tantalum foil. Atomic force microscopy studies show that the preparation method traditionally used provides an excellent substrate root-mean-square