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Comparison of MOCVD and MBE semiconductor superlattices for the evaluation of depth resolution in AES and SIMS

✍ Scribed by M. Furuya; M. Soga; H. Takano

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 463 KB
Volume: 100-101
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(96)00329-7

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