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Depth profiling of magnesium- and titanium-doped LiNbO3 waveguides

โœ Scribed by T. Bremer; P. Hertel; S. Oelschig; R. Sommerfeldt; W. Heiland


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
285 KB
Volume
175
Category
Article
ISSN
0040-6090

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Boron and germanium 6-doped silicon samples were studied using SIMS depth profiling on a Cameca IMS-4F instrument with O,', N z + and Cs' primary beams at various energies and incidence angles. The depth resolution characteristics were compared. We show that, with experimental conditions being the s