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Depth profiling and stoichiometric changes due to high-fluence ion bombardments

✍ Scribed by S.T. Nakagawa; Y. Yamamura

Book ID: 113279441
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 325 KB
Volume: 33
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(88)90681-7

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