Depth profile investigations of metallic layer contacts to GaAs(100) and InP(100) by means of Auger Electron Spectroscopy and sputter technique

✍ Scribed by S. Stein; A. Reif; P. Streubel; A. Tschulik; H. Störi

• Book ID: 112291119
• Publisher: Springer
• Year: 1991
• Tongue: English
• Weight: 318 KB
• Volume: 341
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00322109