Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

✍ Scribed by R. Kosiba; G. Ecke; J. Liday; J. Breza; O. Ambacher

• Book ID: 108418182
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 175 KB
• Volume: 220
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(03)00833-x