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Deposition temperature dependent characteristics of magnetron sputtered chromium nitride films

✍ Scribed by Kacsich, T; Neubauer, M; Geyer, U; Baumann, K; Rose, F; Uhrmacher, M

Book ID: 121353461
Publisher: Institute of Physics
Year: 1995
Tongue: English
Weight: 681 KB
Volume: 28
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/28/2/027

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