Deposition of tantalum and tantalum oxide by superimposed rf and dc sputtering: F Vratny, J Electrochem, Soc, 114, 1967, 505–507

• Book ID: 103446820
• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 161 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)90273-4