1363. Tantalum film deposited by asymmetric a-c sputtering: F Vratny and D J Harrington, J Electrochem Soc, 112, (5), May 1966, 484–489

• Book ID: 103455259
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 157 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(66)91631-9