Tantalum film deposited by asymmetric a-c sputtering : F. Vratny and D. J. Harrington, J. Electrochem. Soc., 112, No. 5, May (1966), p. 484

• Book ID: 103273032
• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 93 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90246-6