✦ LIBER ✦

Deposition of ta-C:H films by r.f. plasma discharges

✍ Scribed by Schwan, J.; Ulrich, S.; Jung, K.; Ehrhardt, H.; Samlenski, R.; Brenn, R.

Book ID: 121381175
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 494 KB
Volume: 4
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(94)05239-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma processes in methane discharges d

Plasma processes in methane discharges during r.f. plasma-assisted chemical vapour deposition of a-C:H thin films

✍ E.H.A. Dekempeneer; J. Smeets; J. Meneve; L. Eersels; R. Jacobs 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 366 KB

Roughness and deposition mechanism of DL

Roughness and deposition mechanism of DLC films prepared by r.f. plasma glow discharge

✍ Alanazi Ali; Kenji K Hirakuri; Gernot Friedbacher 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 437 KB

Due to the attractive properties, diamond-like amorphous carbon (DLC) films have been developed as resist material for photo lithography and as hard coatings. For these applications flat surfaces are required. In this work, the surface morphology and the deposition mechanism of DLC films have been i

Internal stresses in ta-C films deposite

Internal stresses in ta-C films deposited by pulse arc discharge method

✍ Inkin, V.N.; Kirpilenko, G.G.; Kolpakov, A.J. 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 777 KB

Smooth diamond film deposition by a. c.

Smooth diamond film deposition by a. c. discharge plasma chemical vapor deposition

✍ S.Y. Choi; C.J. Zhang; G.S. Lee 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 406 KB

Diamond film deposition by downstream d.

Diamond film deposition by downstream d.c. glow discharge plasma chemical vapour deposition

✍ Polushkin, V.M.; Polyakov, S.N.; Rakhimov, A.T.; Suetin, N.V.; Timofeyev, M.A.; 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 452 KB

Carbon deposition on metallic surfaces s

Carbon deposition on metallic surfaces studied by r.f. plasma discharge

✍ Cairns, J. A.; Coad, J. P.; Richards, E. W. T.; Stenhouse, I. A. 📂 Article 📅 1980 🏛 Nature Publishing Group 🌐 English ⚖ 259 KB