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Internal stresses in ta-C films deposited by pulse arc discharge method

โœ Scribed by Inkin, V.N.; Kirpilenko, G.G.; Kolpakov, A.J.

Book ID
121240826
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
777 KB
Volume
10
Category
Article
ISSN
0925-9635

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