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Deposition of superhard amorphous carbon films by pulsed arc sources

✍ Scribed by Scheibe, H.-J.; Schultrich, B.; Ziegele, H.; Siemroth, P.


Book ID
111657834
Publisher
IEEE
Year
1997
Tongue
English
Weight
69 KB
Volume
25
Category
Article
ISSN
0093-3813

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