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Deposition of PbTiO3 thin films from thd-complexes by an aerosol source MOCVD method

โœ Scribed by I.E. Korsakov; A.R. Kaul; L. Klippe; J. Korn; U. Krause; M. Pulver; G. Wahl


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
287 KB
Volume
29
Category
Article
ISSN
0167-9317

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ChemInform Abstract: Deposition of Thin
โœ Graeme A. Horley; Mike R. Lazell; Paul O'Brien ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons โš– 33 KB ๐Ÿ‘ 2 views

Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt 2 ) 3 , by Aerosol-Assisted CVD. -The novel liquid gallium monothiocarbamato complex (III) is utilized as a single-source precursor for the deposition of face-centered cubic GaS films on glass substra