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Deposition of Nb3Ge films on continuous stainless steel tapes by hollow cathode magnetron sputtering

✍ Scribed by Hoshi, Y.; Terada, N.; Naoe, M.; Yamanaka, S.

Book ID
114645841
Publisher
IEEE
Year
1981
Tongue
English
Weight
285 KB
Volume
17
Category
Article
ISSN
0018-9464

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Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo