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Deposition of Erbium Containing Film in Porous Silicon from Ethanol Solution of Erbium Salt

✍ Scribed by V. Petrovich; S. Volchek; L. Dolgyi; N. Kazuchits; V. Yakovtseva; V. Bondarenko; L. Tsybeskov; P. Fauchet


Book ID
110277855
Publisher
Springer
Year
2000
Tongue
English
Weight
42 KB
Volume
7
Category
Article
ISSN
1380-2224

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Cathodic deposition of amorphous silicon
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A-t----Amorphous silicon containing cubon, hydrogen and fiuorine were ekctrodeposited from solutions contaittmg cthyicrrc glycol, hydrofluoric acid, and tetraethyl orthosilicate or sihcie seid. The deposits were charscterizcd by electrical titance and ir reflectance nKaauremcnts. The deposits exhibi