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Deposition of DLC films in and r.f. plasmas

✍ Scribed by Mutsukura, Nobuki; Yoshida, Katsu-ichi

Book ID: 122840399
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 404 KB
Volume: 5
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(95)00495-5

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