✦ LIBER ✦

Deposition of copper films by unbalanced d.c. magnetron sputtering

✍ Scribed by J. Musil; A. J. Bell; M. Čepera

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition of thick films of oxygen-free

✍ D. Monagham; R.D. Arnell 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 596 KB

XRD microstructural study of Zn films de

✍ R. Kužel Jr.; V. Valvoda; M. Chládek; J. Musil; J. Matouš 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 833 KB

Deposition of graded alloy nitride films

✍ D.P. Monaghan; D.G. Teer; K.C. Laing; I. Efeoglu; R.D. Arnell 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 650 KB

Novel PVD films by unbalanced magnetron

✍ D Monaghan; RD Arnell 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 789 KB

Wear behavior of DC unbalanced magnetron

✍ S.H. Yao; Y.L. Su; W.H. Kao; K.W. Cheng 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 203 KB

Copper sulfide films deposited by cylind

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 322 KB