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Deposition at low substrate temperatures of high-quality TiO_2 films by radical beam–assisted evaporation

✍ Scribed by Yamada, Yasumi ;Uyama, Haruo ;Watanabe, Shigeyuki ;Nozoye, Hisakazu


Book ID
115348427
Publisher
The Optical Society
Year
1999
Tongue
English
Weight
94 KB
Volume
38
Category
Article
ISSN
1559-128X

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