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Dependence of ZnO films on sputtering parameters and saw device on ZnO/InP

✍ Scribed by C.T. Lee; Y.K. Su; S.L. Chen

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 381 KB
Volume: 96
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(89)90637-4

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