High rate epitaxial growth of ZnO films on sapphire by planar magnetron rf sputtering system

✍ Scribed by T. Shiosaki; S. Ohnishi; Y. Murakami; A. Kawabata

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 427 KB
• Volume: 45
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(78)90461-x