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Dependence of the work-function difference between the polysilicon gate and silicon substrate on the doping level in polysilicon

โœ Scribed by Lifshitz, N.


Book ID
114595098
Publisher
IEEE
Year
1985
Tongue
English
Weight
489 KB
Volume
32
Category
Article
ISSN
0018-9383

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Impact of the polysilicon doping level o
โœ C. Leveugle; P.K. Hurley; A. Mathewson; S. Moran; E. Sheehan; A. Kalnitsky; A. L ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 305 KB

In this work, new observations noted in the capacitance-voltage (CV) behaviour of polysilicon/oxide/silicon capacitor structures are reported. As the doping concentration in the polysilicon layer is reduced, anomalous CV characteristics are observed, which are not related to depletion into the polys