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Dependence of the sticking coefficient of sputtered atoms on the target–substrate distance

✍ Scribed by Mahieu, S; Van Aeken, K; Depla, D; Smeets, D; Vantomme, A


Book ID
111907674
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
179 KB
Volume
41
Category
Article
ISSN
0022-3727

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