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Dependence of the electron affinity of homoepitaxially grown CVD diamond on the amount of surface oxygen

✍ Scribed by Makoto Yokoyama; Toshimichi Ito

Book ID
108416209
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
545 KB
Volume
162-163
Category
Article
ISSN
0169-4332

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## Abstract A transmission electron microscopy (TEM) study, comparing homoepitaxial diamond layers grown on different substrate surface preparation states and crystallographic orientation is presented. Quality of epilayers grown on {111} cleaved surface and on {001} polished one is evaluated in ter