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Influence of the substrate type on CVD grown homoepitaxial diamond layer quality by cross sectional TEM and CL analysis

✍ Scribed by Araújo, D.; Alegre, M.P.; García, A.J.; Navas, J.; Villar, M.P.; Bustarret, E.; Volpe, P.N.; Omnès, F.

Book ID
122550799
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
836 KB
Volume
20
Category
Article
ISSN
0925-9635

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## Abstract A transmission electron microscopy (TEM) study, comparing homoepitaxial diamond layers grown on different substrate surface preparation states and crystallographic orientation is presented. Quality of epilayers grown on {111} cleaved surface and on {001} polished one is evaluated in ter