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The influence of surface treatment on the electronic structure of CVD diamond films

✍ Scribed by Graupner, R.; Stöckel, R.; Janischowski, K.; Ristein, J.; Hundhausen, M.; Ley, L.

Book ID: 122027094
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 410 KB
Volume: 3
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(94)90294-1

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## Abstract The photosensitive, nominally undoped nanocrystalline diamond (NCD) films were grown on insulating substrates at a relatively low temperature below 600 °C. The NCD films were exposed to the hydrogen plasma and then briefly to the oxide plasma. This treatment significantly reduced the su