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Dependence of plasma parameters on electric potential of electrode in microwave plasma

✍ Scribed by Isamu Kato; Toru Matsushita; Makoto Yamashita

Publisher: John Wiley and Sons
Year: 1996
Tongue: English
Weight: 552 KB
Volume: 79
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.4420790506

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