✦ LIBER ✦
7363. Control of plasma parameters and electric fields in a microwave-rf hybrid plasma: H Fujita et al, J Appl Phys, 67, 1990, 6114–6117
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 145 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.