Effects of electric field on the growth of diamond by microwave plasma CVD
β Scribed by S. Yugo; T. Kimura; T. Muto
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 521 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0042-207X
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We have investi ated the effects of reactant residence time on the properties of microwav+a88isted CV % diamond films. Using a constant process pressure of 40 Torr and gas composition of 1% CHb in Hr? the total gas flow rate was adjusted from 25 to 800 seem. For OUT reactor, this correspond8 to res
## Abstract Carbon nanotubes (CNTs) have been grown aligned with the directions of electric fields in a DC plasmaβenhanced (DC PE) CVD process. The CNTs can be grown at various predefined angles with respect to the substrate. It is shown that the local electric field, even at the very surface of th