Dependence of nickel gettering on crystalline nature in as-grown Czochralski silicon wafer

✍ Scribed by Lee, In-Ji; Paik, Ungyu; Park, Jea-Gun

• Book ID: 118739819
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 965 KB
• Volume: 365
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2012.12.033