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Density measurement of thin-films for micro-electromechanical systems using micro-cantilever structures

✍ Scribed by E.J. Boyd; V. Nock; X. Li; D. Uttamchandani

Book ID: 113937158
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 815 KB
Volume: 519
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.07.017

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